Electro-mechanic-thermal coupling modeling and simulation for 3D BAW filter chip
In order to directly and efficiently model and analyze the electro-mechanic-thermal coupling effect of complex three-dimensional(3D)bulk acoustic wave(BAW)filter structures,an muti-physical electro-mechanic-thermal coupling algorithm based on finite element(FEM)method is utilized in this paper.Firstly,a 3D BAW filter geometric model is built and material properties are set inside the geometric structure.Secondly,the electro-mechanical coupling algorithm of solid mechanics and static field coupling is constructed based on FEM method.Then,the heat dissipation problem is considered,which is caused by the mechanical loss of piezoelectric material in the working process of the BAW filter,and the muti-physical electro-mechanic-thermal coupling algorithm is established to directly solve the above problem.A new autonomous grid mesh technique is used in the muti-physical coupling algorithm.Finally,electro-mechanic-thermal coupling simulation results of BAW filter are given with an operating bandwidth of 2.27-2.44GHz,in-band loss within 3dB and out-of-band suppression below-20dB.
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