This article elaborates on the principle and method of structural micro-vibration design for a cast-in-place concrete fab and two precast concrete fabs during the fifteen year construction period of an electronic project,and publishes the as-built micro-vibration survey results after project completion.By analyzing the impact of precast concrete structures on the overall horizontal stiffness,vertical local stiffness of floor slabs,and micro-vibration performance of the fab building,examples have been used to verify that precast concrete electronic fab buildings can meet the micro-vibration criteria required for electronic semiconductor production equipment.
维普
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