Theory analysis of angle measurement by point source non-localized interference based on geometric optics
Aims:Due to the advantages of non-contact,high sensitivity and high accuracy,measurement technology for micro/small angle by the point light source non-localized interference has attracted much attention.This paper aims to solve the shortcomings of existing analysis theories,which are not clear in explaining the mechanism of forming a pair of virtual point light sources on two flat crystal surfaces,and are difficult to be universally applied to multi-surface measuring devices.Methods:Taking the measurement of flat crystal wedge angles as an example,and based on the geometric optics theory,the relationship between the center lateral displacement of interference concentric rings and the wedge angles was derived.The difference between the derived relationship and the literature relationship was studied through visualization.Results:With the exception of the zero point,the wedge angle value given by the modified relationship was slightly smaller,i.e.,the wedge angle deviation was 0.027″ and 0.003″when the center lateral shift was 10 mm and 1 mm,respectively.Conclusions:The analysis method based on geometric optics theory can not only analyze the wedge angle measurement prinple of flat crystal individual components,but can also analyze the angle measurement princple of polyhedral variant structures.It can quantitatively analyze the relationship between the center lateral displacement and the wedge angle,and achieve the simulation of interference concentric rings,enriching the non local interference angle measurement technology of point light sources.
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