Study on the behavior of electrohydrodynamic jet printing on silicon surfaces for micro-electromagnetic coil fabrication
The influences of printing parameters and substrate properties on the printing process and results of electrohydrodynamic jet printing behavior on silicon substrates were studied.The printing parameters were optimized,and planar electromagnetic coils were successfully prepared on silicon substrates.The results indicates that printing parameters significantly impact the formation of the dynamic cone jet and the final pattern morphology.The magnitude of the bias voltage affects the accumulated ink volume,while the amplitude voltage influences jet stability.Printing height affects the electric field force,and printing frequency and duty cycle influence deposition efficiency and line width.Additionally,the substrate surface wettability has a significant impact on the deposited ink line width,while the line width decreases with the lowered contact angle.Furthermore,to address the ink accumulation issue often encountered at the corners of square coils,this article proposes an optimization scheme for the printing path,specifically apply-ing fillet processing to the corners of the square coils.This effectively improves the consistency of the coil structure.Finally,based on the aforementioned research,electromagnetic induction coils with uniform morphology and good consistency are fabricated on the silicon surface which exhibits excellent linearity in mT-level magnetic field tests.
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