White light interference-based grayscale height mapping for fast on-machine measurement
The noncontact optical full-field on-machine measurement effectively identifies machining errors and improves machining efficiency in ultraprecision machining.In this study,a surface topography on-machine measurement method is developed for the microstructured optical components based on white light interference.The surface topography can be reconstructed using only two interferograms collected with a specific interval by establishing grayscale height mapping.Practically,taking a typical microstructured optical component as an example,the proposed method can significantly improve measurement efficiency while maintaining comparable accuracy to the scanning white light interferometry method.The resistance to nanoscale machine vibration has been verified by determining the influence of several parameters on the measurement results.Finally,the effectiveness of the proposed large-aperture on-machine measurement based on sub-aperture stitching is verified through experiments.
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