Effects of the VGS sweep range on the short channel effect in negative capacitance FinFETs

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作者：

Fan ZHANG、Zhaohao ZHANG、Jiaxin YAO、Qingzhu ZHANG、Gaobo XU、Zhenhua WU、Huan LIU、Genquan HAN、Yan LIU、Huaxiang YIN

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作者单位：

Integrated Circuit Advanced Process R&D Center,State Key Lab of Fabrication Technologies for Integrated Circuits,Institute of Microelectronics of Chinese Academy of Sciences,Beijing 100029,China

School of Microelectronics,Xidian University,Xi'an 710071,China

School of Integrated Circuits,University of Chinese Academy of Sciences,Beijing 100049,China

基金：

National Key R&D Program of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaYouth Innovation Promotion Association,Chinese Academy of SciencesMajor Program of Zhejiang Natural Science Foundation

项目编号：

2022ZD0119002919642029206400362025402620900339236420492264202622935222023130LDT23F04024F04

出版年：

2024

DOI：

10.1007/s11432-023-4006-7

中国科学:信息科学(英文版)

中国科学院

中国科学:信息科学(英文版)

CSTPCDEI

影响因子：0.715

ISSN：1674-733X

年,卷(期)：2024.67(6)