A high precision two-axis GMR angular sensor manufactured by post-annealing
Zitong ZHOU 1Zhiqiang CAO 2Shaohua YAN 1Xiaolong WANG 1Libo XIE 1Shiyang LU 1Dapeng ZHU 1Qunwen LENG 3Weisheng ZHAO3
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作者信息
1. School of Integrated Circuit Science and Engineering,Beihang University,Beijing 100191,China;Beihang Qingdao Microelectronics Research Institute,Beihang University,Qingdao 266000,China
2. School of Integrated Circuit Science and Engineering,Beihang University,Beijing 100191,China;National Key Lab of Spintronics,Institute of International Innovation,Beihang University,Hangzhou 311115,China
3. School of Integrated Circuit Science and Engineering,Beihang University,Beijing 100191,China
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基金项目
National Key Research and Development Program(2021YFB3201800)
Taishan Scholars Program,and International Collaboration Project(B16001)
NETL
NSTL
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