Changsha Semiconductor Technology and Application Innovation Research Institute,College of Semiconductors(College of Integrated Circuits),Hunan University,Changsha 410082,China
Songshan Lake Materials Laboratory,Dongguan 523808,China
Hunan Provincial Natural Science Foundation of ChinaNatural Science Foundation of ChangshaNational Natural Science Foundation of ChinaEducation Department of Hunan ProvinceSynergetic Extreme Condition User FacilityFundamental Research Funds for the Central Universities