现代化产业体系中科技创新与产业创新的深度融合:全球新一代光刻系统的启示

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中文摘要：以科技创新引领现代化产业体系建设是把握新一轮科技革命和产业变革机遇的战略选择,也是面向高水平科技自立自强赢得战略主动的必然之举.科技创新是产业创新的内生动力,产业创新是科技创新的价值实现,构建和完善现代化产业体系关键在于实现科技创新和产业创新的深度融合.文章以全球极紫外(EUV)光刻系统为例,基于创新链视角,从"应用基础研究—应用研究—中试放大—大规模量产"4个阶段对EUV光刻系统的突破性创新历程进行梳理,从"多元主体协同加强应用导向科技供给提升技术体系先进性""龙头企业引领打通全产业链资源促进供应体系完整性"和"制度设计创新保障成果产出转化增强创新体系能动性"3个层面提炼科技创新和产业创新的深度融合的关键机制,为我国抢占科技制高点,建设现代化产业体系和发展新质生产力提供理论和实践启示.

外文标题：Deep integration of technological innovation and industrial innovation in modern industrial system:Inspiration from global new generation lithography systems

外文摘要：Utilizing technological innovation to lead the construction of a modern industrial system is a strategic choice for seizing the opportunities of the new round of technological revolution and industrial transformation.It is also a necessary step for winning the strategic initiative towards high-level self-reliance and self-improvement.Technological innovation is the intrinsic driving force behind industrial innovation,and industrial innovation is the value embodiment of technological innovation.The deep integration of technological innovation and industrial innovation is the key to constructing and improving a modern industrial system.Taking the global extreme ultra-violet(EUV)lithography system as an example,based on the perspective of the innovation chain,this study explores the breakthrough of EUV lithography system from four stages:applied basic research-applied research-pilot scale-up-large scale production.It refines the process of the formation of closely dynamic deep integration of technological innovation and industrial innovation from aspects such as diversified main bodies collaborating to strengthen application-oriented technological innovation supply to enhance the advancement of the technical system,leading enterprises leading to break through the industrial chain resources to promote the integrity of the supply system,and innovative institutional design ensuring the output transformation of achievements to enhance the dynamic nature of the innovation system.This provides theoretical and practical insights for China to seize the commanding heights of global science and technology and build modern industrial systems,as well as develop new quality productivity.

外文关键词：

modern industrial systemscience and technology innovationindustrial innovationdeep integrationextreme ultra-violet(EUV)lithography

作者：

余江、陈凤、郭玥

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作者单位：

中国科学院大学公共政策与管理学院北京 100049

中国科学院科技战略咨询研究院北京 100190

关键词：

现代化产业体系科技创新产业创新深度融合极紫外光刻

基金：

国家自然科学基金国家自然科学基金国家自然科学基金中国科学院战略性先导科技专项教育部哲学社会科学重大课题攻关项目

项目编号：

723340077220422771834006XDA038000020JZD022

出版年：

2024

DOI：

10.16418/j.issn.1000-3045.20240521003

中国科学院院刊

中国科学院

中国科学院院刊

CSTPCDCSSCICHSSCD北大核心

影响因子：1.618

ISSN：1000-3045

年,卷(期)：2024.39(7)