Preparation of Rare Earth Polishing Powder Based on Fluorosilicate Mixed Acid and Its Polishing Performance
The fluorine-containing and cerium-based rare earth polishing powder was prepared with carbonate lanthanum cerium as precursor by the processes including fluorination of hydrofluoric acid and fluorosilicate mixed acid,high temperature calcination and ball milling.Performances of cerium-based rare earth polishing powders with different fluorine were characterized by X-ray diffraction,scanning electron microscope,transmis-sion electron microscope particle,size analyzer,laser confocal microscope and other detection methods.The re-sults show that the phase compositions of cerium-based rare earth polishing powders after fluorination with hydro-fluoric acid and fluorosilicate mixed acid are the same,with CeO2,LaOF and LaF3 diffraction peaks appearing.After fluorination,the morphology of the two kinds of polishing powders changes significantly.The polishing powder particles after fluorination with hydrofluoric acid were well formed,and the average particle size of the primary particles is about 113 nm.Spherical particles appear after the fluorosilicate mixed acid fluoridation,and the average particle size of the primary particles is about 90 nm.Compared with the cerium-based rare earth pol-ishing powder fluorinated by hydrofluoric acid,the particle size is smaller and the sphericity is better.The grind-ing rate of the cerium-based rare earth polishing powder fluorinated by hydrofluoric acid and fluorosilicate mixed acid remained basically unchanges for four times.The surface roughness of the polished K9 glass of 250 μm× 250 μm is 84.54 and 81.85 nm,respectively.The difference of surface roughness between the two polishing powders is small.
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