Effect of Cerium Addition on Phase Transformation and Application Properties of Al-Mn Target
AlMn-Ce alloy targets with different rare earth Ce contents were prepared by vacuum induction fur-nace.X-ray diffraction,GSAS,scanning electron microscope,energy dispersive spectrometer,universal testing machine and brinell hardness measurements were used to analyze the phase composition,phase distribution and alloy plasticity and toughness of the target.At the same time,the Al85Mn15-10％Ce alloy target was selected for the coating test,and the phase structure and corrosion resistance of the coating were tested by grazing incidence X-ray diffraction and potentiodynamic polarization curve.The results show that the Al-Mn compound in the Al85Mn15 alloy without Ce addition formed a coarse dendritic structure with high hardness and brittleness,and the target surface was cracked during the coating process,making it unusable;after adding Ce,the Ce element is preferentially combined with Al and Mn elements to form the primary phase of Al10CeMn2 which can effective-ly restrict the growth of the Al-Mn compound and improve the uniformity of the structure.When the Ce content is 10％,the compressive strain rate of the alloy reaches 2.05％,the plasticity and toughness are the best,and the target is complete during the coating process;if the Ce content is further increased(above 20％),too much Ce elements combine with Al to form a lath-shaped Al11Ce3 primary phase which reduces the ductility and tough-ness of the target.The Al85Mn15-10％Ce target was coated to form an amorphous coating with a self-corrosion po-tential of-0.49 V and a self-corrosion current density of 5.1×10-8 A·cm-2,showing good corrosion resistance.Ce addition improves the brittleness of Al85Mn15 alloy and ensures the application requirements of magnetron sputter-ing;at the same time,it helps to promote the formation of amorphous structure in Al-Mn based coating under the condition of relatively low Mn(Mn=15％)content,improving the corrosion resistance of the coating.
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