Research on Micro-machining Technology of Crevice Cavity Parts for Vacuum Electronic Devices
Research on micro-machining technology is carried out to meet the high-precision design re-quirements of key crevice parts for G-band distributed klystrons.Based on existing processing experience and equipment conditions,through innovative process design and extensive process experiments,the preci-sion machining technology of small-sized and ultra-high precision parts is developed,which can meet the manufacturing requirements of key parts for millimeter-wave and terahertz vacuum electronic devices,thus improving the manufacturing technology level of high frequency vacuum electronic devices.
Micro-machiningMachining processCrevice cavityPrecision part