Research on micro-machining technology is carried out to meet the high-precision design re-quirements of key crevice parts for G-band distributed klystrons.Based on existing processing experience and equipment conditions,through innovative process design and extensive process experiments,the preci-sion machining technology of small-sized and ultra-high precision parts is developed,which can meet the manufacturing requirements of key parts for millimeter-wave and terahertz vacuum electronic devices,thus improving the manufacturing technology level of high frequency vacuum electronic devices.
关键词
微细加工/加工工艺/隙缝腔/精密零件
Key words
Micro-machining/Machining process/Crevice cavity/Precision part
维普
万方数据