首页|1.90~2.10μm吸收型带通滤光片的研制

1.90~2.10μm吸收型带通滤光片的研制

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介绍了 1.90~2.10 μm吸收型带通滤光片的设计与优化理论、制备中的工艺参数改进以及产品的测试方法.选用Ge、SiO作为高、低折射率镀膜材料,匹配等效折射率的方式在膜系中添加匹配层,使用TFCalc软件优化膜系,平滑消除陷波.研制出了中心波长为 2.0μm时通带内透过率大于 92%,在截止带 1.0~1.60 μm处和 2.50~3.89 μm处的平均透过率小于0.8%,10 层、2798 nm总厚度的 1.90~2.10 μm吸收型带通滤光片.该种滤光片膜层数少、厚度小,能够显著缩短滤光片的真空制备时间,提高了膜层控制精度,满足了批量化生产的需求.
Development of 1.90-2.10μm Absorption Bandpass Filters
The design and optimization theory,the process parameter improvements in preparation,and the product testing methods of 1.90-2.10μm absorption bandpass filters are introduced.Ge and SiO are selected as high and low refractive index coating materials,respectively,and a matching layer is added to the film system by matching the equivalent refractive index.The TFCalc software is used to optimize the film system and smoothly eliminate the notch.A 1.90-2.10μm absorption bandpass filter with 10 layers and a total thickness of 2798 nm is developed,with a passband transmittance greater than 92%at a center wavelength of 2.0μm and an average transmittance of less than 0.8%at cutoff bands of 1.0-1.60μm and 2.50-3.89 μm.This type of filter film has fewer layers and a smaller thickness,which can significantly shorten the vacuum preparation time of the filter,improve the control accuracy of the film layer,and meet the needs of mass production.

Central wavelengthBandpass filterEquivalent refractive indexMatching layerMem-brane designProcess parameters

张翔、张薇

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陕西华星电子集团有限公司,陕西 咸阳 712099

中心波长2.0μm 带通滤光片 等效折射率 匹配层 膜系设计 工艺参数

2024

真空电子技术
北京真空电子技术研究所

真空电子技术

影响因子:0.166
ISSN:1002-8935
年,卷(期):2024.(4)