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金刚石固态微波功率器件研究进展和展望

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被誉为终极半导体材料的金刚石具有超宽的禁带宽度、超高击穿电场、高的载流子漂移速率、极高的热导率、极强的抗辐射能力等特性,在微波功率器件领域具有很好的应用前景.金刚石微波功率器件的研究近几年引起了广泛关注,文章总结了金刚石微波功率器件的研究进展,重点分析了目前主流的氢终端金刚石、表面氧化物终端金刚石和掺杂金刚石实现的微波功率器件的研究进展、面临问题和发展展望.
Research Progress and Prospect of Diamond Solid-state Microwave Power Devices
Known as the ultimate semiconductor material,diamond has excellent application prospects in microwave power devices due to its ultra-wide bandgap,ultra-high breakdown electric field,high carrier drift rate,extremely high thermal conductivity,and strong radiation resistance.The research on diamond microwave power devices has attracted widespread attention in recent years.The research progress of diamond microwave power devices is summarized.The research progress,the problems and the development prospects of the micro-wave power devices based on hydrogen terminated diamond,surface oxide terminated diamond,and doped dia-mond are mainly analyzed.

DiamondField effect transistorElectrical propertyPowerSurface terminal

蔚翠、冯志红、何泽召、周闯杰、郭建超、马孟宇、余浩、刘庆彬、李鹏雨

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中国电子科技集团公司第十三研究所 固态微波器件与电路全国重点实验室,河北石家庄 050051

金刚石 晶体管 电性能 功率 表面终端

2024

真空电子技术
北京真空电子技术研究所

真空电子技术

影响因子:0.166
ISSN:1002-8935
年,卷(期):2024.(5)