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大尺寸低损耗金刚石窗片制备及微波窗口封接

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为满足长脉冲大功率回旋管研制需求,采用直流电弧等离子体喷射化学气相沉积法合成大尺寸低损耗金刚石厚膜窗片;通过表面金属化和钎焊工艺进行微波窗口的封接 采用法布里-玻罗(Fabry-Perot)开放激励腔、激光导热仪、三维轮廓仪、激光干涉仪等对金刚石窗片介电损耗、热导率、表面平坦度、粗糙度等性能参数进行了表征;采用氦质谱检漏仪、高功率长脉冲微波测试平台测试了窗口气密性和微波吸收特性.实验结果表明,抛光厚度1.36 mm的金刚石窗片具有高尺寸精度,热导率达到17.9~18.7 W·cm-1·K-1;波导窗片介电损耗tanδ=1.76 × 10-4,回旋管窗片tanδ=2.6 × 10-4.计算结果表明,在1 MW微波输入功率下波导窗损耗功率约2.34 kW,窗片中心热应力在安全数值内,相同损耗功率条件下回旋管窗口可承受至少680 kW的输出功率.
Preparation of Large-sized Low Loss Diamond Disks and Microwave Window Welding
Large-sized low loss diamond disks for long pulse high-power gyrotron are developed by DC arc plasma jet chemical vapor deposition.The diamond disks are welded through surface metallization and brazing process.Key performance parameters such as dielectric loss,thermal conductivity,surface flatness,and rough-ness are characterized by Fabry Perot open excitation cavity,laser thermal conductivity meter,3D profilometer,laser interferometer,etc.The vacuum sealability and microwave absorption property of the windows are tested by helium mass spectrometer leak detector and high-power long pulse microwave testing platform,respectively.The results show that the diamond disks with polished thickness of 1.36 mm have high dimensional accuracy with ther-mal conductivity of 17.9-18.7 W·cm-1·K-1.The dielectric loss tan8 of waveguide window is 1.76 × 10-4,and the dielectric loss tanδ of gyrotron window is 2.6 × 10-4.The calculation results indicate that with a microwave input power of 1 MW,the waveguide window loss power is about 2.34 kW,and the thermal stress at the center of the window is within the safe range.Under this power loss conditions,the gyrotron window can withstand an output power of at least 680 kW.

DC arc plasma jetDiamond disksMicrowave window

李义锋、姜龙、安晓明、葛新岗、张雅淋、仝婷婷、张平伟、刘晓晨、郭辉、任斌、孙振路

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河北普莱斯曼金刚石科技有限公司,河北石家庄 050081

河北省激光研究所有限公司,河北石家庄 050081

河北省化学气相沉积金刚石重点实验室,河北石家庄 050081

河北省科学院能源研究所,河北石家庄 050081

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直流电弧等离子体喷射 金刚石窗片 微波窗口

2024

真空电子技术
北京真空电子技术研究所

真空电子技术

影响因子:0.166
ISSN:1002-8935
年,卷(期):2024.(5)