A Micro wave Atmospheric Pressure Plasma Jet Based on Rectangular Coaxial Structure
Microwave atmospheric pressure plasma jet has the advantages of high density,high ionization degree and strong particle activity,which has received wide attention in the fields of material processing and medical treatment,etc.However,the existing microwave atmospheric pressure plasma jet source still have prob-lems of small jet and single treatment area,and limited uniformity.A portable microwave atmospheric pressure plasma jet source operating at 2.45 GHz is designed based on rectangular coaxial structure,and the feed position parameters are optimized.The effects of the inner and outer conductor gaps on gap electric field strength are ana-lyzed,and the effects of different argon gas flow rates on plasma morphology are investigated.The results show that the plasma morphology changes with the increase of gas flow rate,and a plasma jet with a width of about 20 mm and a length of about 3 mm is generated at a gas flow rate of 40 L/min.The proposed device solves the problems of plasma source uniformity and insufficient treatment area in industrial applications to some extent,and also contributes to further in-depth study of large-area uniform plasma.