Airborne Molecular Continent(AMC)is one of the main factors affecting the production environment of cleanrooms,and therefore the control of indoor AMC concentration in clean rooms has become one of the key issues for the development of the semiconductor industry.This paper described the methods of effectively controlling indoor AMC concentration from the aspects of"prevention"and"treatment",provided different treatment methods and application scenarios of outdoor fresh air,provided the standards and basis for the selection of decoration materials in clean room,and researched the sensitivity of VOCs in the panel industry,which is highly sensitive.It also studies the treatment and application scenarios of VOCs(Volatile Organic Compound),which is highly sensitive in the panel industry,and provided references and practical significance for the subsequent design of related cleanrooms.
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