Research on Flexible Pressure Sensor with Regularized Micro-nano Cone Shape Structure
Using electrochemical anodization,the conical anodic aluminum oxide(C-AAO)templates were prepared,and the regularized micro-nanocone polyaniline/polymethyl methacrylate(PANI/PMMA)flexible conductive films were constructed by in-situ polymerization and spin-coating methods.The flexible piezo-resistive sensor was prepared by interlocking encapsulation.The surface morphology,Fourier transform infrared spectrum of PANI-PMMA conductive film and sensing performance of the sensor were tested and analyzed.The results show that the sensor with a micro-nanocone length of(1.38±0.03)µm exhibits high sensitivity of 108.27 kPa1,cyclic stability at 2 000 times of loading and unloading and low hysteresis of±4.72%in the range of 0~2.3 kPa,which can monitor wrist motion status and body motion status.