Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China|Shanghai Huahong Grace Semicond Mfg Corp, Shanghai 201203, Peoples R China|Univ Chinese Acad Sci, Beijing 100049, Peoples R China
Shanghai Huahong Grace Semicond Mfg Corp, Shanghai 201203, Peoples R China
Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China