首页|Irradiation effects on RB-SiC ceramic with heterogeneous grain boundary segregation interfaces induced by oxygen (O_2) plasma surface modification

Irradiation effects on RB-SiC ceramic with heterogeneous grain boundary segregation interfaces induced by oxygen (O_2) plasma surface modification

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For RB-SiC space optical hard-brittle ceramic materials, it's easy to introduce subsurface damage defects during precision grinding. Subsurface damage (SSD) defects affect the imaging quality, stability, service life and other key technical parameters of space optical hard-brittle ceramic materials. In order to adapt optical components to deep space exploration environment and extreme environment conditions, it's necessary to further highlight the efficient, low damage and high quality to reduce the subsurface defects of optical components, so as to improve the optical performance of optical components. With oxygen (O_2) plasma torches surface modification at room temperature environment (25 ± 5℃) via plasma irradiation, the optical parameters after precision grinding process was improved and SSD was reduced. Via the oxygen plasma surface modification process, the SSD depth will be reduced with [12.6, 28.5] um. Compared with the process of plasma surface modification and without plasma surface modification, the results show that the subsurface damage (SSD) depth of the grinding zone without plasma surface modification was larger via the value reaches as [21.2, 29.8] um. In addition, the melting point of Si phase (1410℃) and SiC phase (2700℃) via the oxygen (O_2) plasma surface modification process with the SiO_2 (hardness = 7) layer with hardness less than SiC (Mohs hardness = 9.2 ~ 9.5) layer was generated. Established a hierarchical precision grinding RB-SiC ceramic the shape precision and surface quality comparison model and analysis fabrication of highly shape accuracy mechanism of subsurface damage (SSD) parameters. As the Normal Temperature Oxygen Plasma Surface Modification Precision Grinding (NT-OPSMPG) process via the oxygen plasma torch (100 ℃), the crack, fold, tiny particle defects at the Si phase and SiC phase boundary of the two phases are obviously reduced (↓).

Hierarchical precision grindingHeterogeneous interface structuresRB-SiC ceramicSurface quality

Jiabin Xu、Chengshuai Sun、Xiangyu Zhang、Yunfei Sun、Weixia Mei、Daigen Chen、Yang Yu、Long Zhang、Feihu Zhang

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School of Mechatronics Engineering, Aeronautics and Astronautics Manufacturing Engineering, Harbin Institute of Technology, Harbin, China

Beijing Automotive Research Institute Co., Ltd. (Referred to As 'BARF' Or 'BAIC Group'), Beijing, China||School of Earth Sciences and Surveying Engineering, China University of Mining and Technology-Beijing, Beijing, China

CNC Engineering Training Center, Tianjin University of Technology and Education, Tianjin, China

Xi'an Research Institute of Huawei Technologies Co., Ltd, (referred to as 'HUAWEI' Or 'Huawei'), Xi'an, China||School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, China

School of Mechatronics Engineering, Shandong Qingzhou Technician College and Shandong Ethnic Secondary Professional School, Qingzhou, China

School of Mechanical Engineering, Tianjin University of Technology and Education, Tianjin, China

College of Engineering and Technology, Southwest University, Chongqing, China

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2025

Applied physics, A. Materials science & processing

Applied physics, A. Materials science & processing

ISSN:0947-8396
年,卷(期):2025.131(5)
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