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Key engineering materials
Trans Tech Publications Ltd.
Key engineering materials

Trans Tech Publications Ltd.

半月刊

1013-9826

Key engineering materials/Journal Key engineering materials
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    Development of Piezo Driven Inchworm Micro X-Y Stage and Hemispherical Tilting Positioner with Microscope Head

    Hisayuki AoyamaHiroyuki ChibaMasato TakizawaYouhei Itami...
    P.513-517页
    查看更多>>摘要：This paper deals with small piezo driven inchworm X-Y stage for a cell-manipulation in SEM chamber. Generally the electric noise from the moto causes the image destorsion in SEM operation. Thus the piezo driven inchworm small X-Y stage has been designed and fabricated as well as another tilting mechanism has been developed so that a micro pipettee can be implemented onto this tilting stage and manipulate such bio cell samples. Here we also developed a manipulation tool with micro force indicating system by using acoustic modulation technique since the microscopic operation in SEM without tactile information is difficult for the operator to control the tool precisely. On the other hand, a self-walking wafer inspection system is also described. The unique system is composed of the hemispherical manipulator and a self-walking piezo driven stage. This small walking mechanism can move on the glass plate that covers on the micro patterned plate. The hemispherical ball with microscope lens that can be rotated by the manner of stick-slip with three point contact piezo actuators is mounted on this self-walking stage so that the microscope lens can be focused onto the target sample to investigate the defect of micro patterns on the printed plate.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Surface Characterization with an lonization Probe

    Chris YangAnatoly ZharinSteven Danyluk
    P.518-523页
    查看更多>>摘要：This paper discusses the application of an ionizing source coupled with galvanic differences between metals in a measure of the work function difference between the metal surfaces. The electrical field generated from the contact potential difference (CPD) between two electrodes will cause the gaseous ions to discharge at both surfaces, creating a measurable current. The current depends on the surface size, spacing, and ionizing source power. One of the surfaces (probe) can vary in shape and size, and if inert, can be used to obtain the work function or surface potential of the second surface. The ionic current is proportional to ion mobility, ion generation rate, CPD, and the probe size, but inversely proportional to the spacing between the probe and the sample. It is found, as expected, that there is an approximate linear relationship between the ionization probe signal and the work function of the surfaces of metals.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    An Optical Fiber Probe for 3-D Micro Metrology

    Hiroshi MURAKAMIAkio KATSUKIHiromichi ONIKURATakao SAJIMA...
    P.524-528页
    查看更多>>摘要：This paper presents a system of 3-D micro structure measurement that uses an optical fiber probe of 5 urn in diameter. The probe is deflected when it comes into contact with a measured surface, and this deflection is measured optically. In this research, we optimize design parameters of optical system using ray tracing, and a prototype of the measuring system is fabricated on trial to verify the simulation results. Then, its measuring accuracies are examined by using the basic experimental apparatus. As a result, it is clarified that the resolution of the fiber probe is better than 10 nm. Also, the utility of this system is confirmed by measuring the shape of a 600 urn diameter ruby sphere.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Development of an On-machine Machining Error Measurement and Compensation System for Micro Milling Process

    Shih-Ming WangHan-Jen YuJih-Pong YangDa-Fan Chen...
    P.529-533页
    查看更多>>摘要：To further enhance the accuracy of a micro milling process, an effective error measurement method and error compensation method are necessary. An on-machine vision-based error measurement method integrating image re-constructive technology, camera pixel correction, and model comparison algorithm to provide the capability of non-contact measurement for micro-machined workpiece error was developed. With use of Canny Edge Detection algorithm and camera pixel calibration, the edge of the contour of a machined workpiece can be identified and used to re-construct the actual shape of the workpiece. The actual shape will then be compared to the theoretical shape of the workpiece. To prove the feasibility of the proposed methods and system, experiments were conducted. The results have shown the success of enhacing machining accuracy for a micro milling process.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Automatic Surface Characterization for Micro-Structured Surfaces Fabricated by Fast Tool Servo Diamond Turning

    De Ping YuYoke San WongGeok Soon Hong
    P.534-538页
    查看更多>>摘要：Fast tool servo diamond turning is a promising machining method for precision and complex micro-structured surfaces with spatial wavelength above tens of microns. It is crucial to measure and characterize the micro-structured surfaces to sub-micrometer form accuracy. The general purpose measurement instruments are not able to evaluate the true form accuracy between the measured surface and designed surface. Therefore, in this paper an automatic surface characterization method is proposed to evaluate the form accuracy for micro-structured surfaces. The fabricated surfaces can be measured by any high-resolution measurement instruments. After the surface measurement, an iterative closest point (ICP) algorithm is modified to align the measured surfaces to the designed surfaces with the form error evenly distributed over the whole surface. After alignment, the designed surface height corresponding to each measured point is calculated to form the areal error map. 3D surface parameters are chosen and calculated from the error map to characterize the surface form error. Experimental results demonstrate the effectiveness of the proposed surface characterization method.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Deformation mode construction using photoresist microstructure devices produced with nanoindention technology

    Yung-Jin WengYung-Chun WengHsu-Kang LiuLin-Hsiung Chiu...
    P.539-543页
    查看更多>>摘要：In this study, we try to produce SU-8 photoresist microstructure devices using nano-imprint technology, and try to conduct nano-indention tests on SU-8 photoresist with nano-indention detector, in order to describe the behaviors and characteristics of nano-indentions on SU-8 microstructure devices and establish the deformation mode for the indention under nano-meter level. The tests tell us that, after nano-indention tests, the result indention hardness increases with the loading rate, indention repeats, and reduction of load or depth. Similarly, the indention hardness decreases because of reduction of loading rate, extension of loading time, and increase of load, and depth. Finally, we propose a deformation mode for nano-indention. This mode can also be used to explain the deformation behavior of SU-8 under nano-indention.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Design of Digital Filters for Si Wafer Surface Profile Measurement - Noise Reduction by Wavelet Transform -

    Masashi OnoKazutaka NonomuraLibo ZhouJun Shimizu...
    P.544-548页
    查看更多>>摘要：Recently in semiconductor industry, production of ever flatter, thinner and larger silicon wafers are required to fulfill the demands of high-density packaging and cost reduction. In geometric evaluation of Si wafers, according to SEMI (Semiconductor Equipment and Materials International) standards, the required wafer flatness approaches to the 22 nanometers by year 2016 [1]. For such application, uncertainty of measured data is encountered as a severe problem because high resolution instrument always incorporate a certain degree of noise. In order to precisely evaluate the wafer profile, it is essential to remove the noise from the measured data. Described in this paper is design and development of digital filters for denoising. Compared to the conventional low-pass filters, the developed filter by use of wavelet transform not only provides better performance of decomposition in the spatial frequency domain, but also offers the new capability of denoising in amplitude domain.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Nanoindentation of Multi-wall CNT Reinforced Al Composites

    Jin-Zhi LiaoJian-Jun PangMing-Jen Tan
    P.549-553页
    查看更多>>摘要：This work used nanoindentation to characterize the local mechanical properties of the multi-wall carbon nanotube (MWCNT) reinforced aluminum (Al) composites. The Al-MWCNT (0.5, 1.0 and 2.0 wt.%) specimens were fabricated by spark plasma sintering (SPS) followed by hot extrusion. Different local regions of the as-extruded and tensile-fractured specimen over the longitudinal and transverse section were studied by nanoindentation. The nanoindentation results were compared with the conventional macro- and mircoscopic mechanical tests, and were found in good agreement. The values of hardness (H) and elastic modulus (E) obtained reached maximum at the 0.5 wt.% MWCNT adding Al samples. E was highest in the necking region then decreased with increasing distance from the localized deformed region; while H varied in different regions. In the same region, H and V were higher in the longitudinal than those in the transverse direction, due to the texture hardening and alignment of CNT.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Design Models of Polymer Electrolyte Membrane Fuel Cell System

    MulyazmiWan Ramli Wan DaudEdy Herianto Majlan
    P.554-558页
    查看更多>>摘要：One important aspect to develop fuel cell design is to use the concept of computational models. Mathematical modeling can be used to help research complex, estimates the optimal performance of fuel cells stack, compare several different processes, save costs and time in the investigation. This paper focuses on several reviews of research models to develop the system design of the Proton Exchange Membrane Fuel Cell (PEMFC). Purposes of this study are to determine the factors that affect system performance include: stack of PEMFC system, water management system and Supply of reactants to the PEMFC stack.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Review on Serpentine Flow Field Design for PEM Fuel Cell System

    ERNI MisranWAN RAMLI Wan DaudEDY HERIANTO Majlan
    P.559-563页
    查看更多>>摘要：Flow field design has several functions that should perform simultaneously. Therefore, specific plate materials and channel designs are needed to enhance the performance of proton exchange membrane (PEM) fuel cell. Serpentine flow field design is one of the most popular channel configurations for PEM fuel cell system. Some configurations have been developed to improve the cell performance. This paper presents a review on serpentine flow field (SFF) design and its influence to PEM fuel cell performance based on some indicators of performance. The comparisons of SFF with other flow field designs are summarized. The results of some experimental and numerical investigations are also presented.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd