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Key engineering materials
Trans Tech Publications Ltd.
Key engineering materials

Trans Tech Publications Ltd.

半月刊

1013-9826

Key engineering materials/Journal Key engineering materials
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    Ultraprecision ELID-Grinding of Aspheric WC Lens Mold for Plastic Injection Molding

    Akihiko NEMOTOHitoshi OHMORIYasuhiko MURATANobuhide ITOH...
    P.155-158页
    查看更多>>摘要：To cope with increasing demands on ultraprecision profiling and finishing of aspheric lens molds, we have implemented an ultra/ nanoprecision aspheric grinding system to be mounted with an ELID- capability and on-line feedback capability of profile accuracy. A WC mold has successfully ground and finished to be with several nanometric surface smoothness and with ultraprecise profile accuracy by just grinding process with ELID mechanism. Some specific conditions have been investigated to achieve better accuracy and quality on molds. This paper presentation introduce those R&D activities and also discuss on the latest achievements on this topics, with showing injected aspheric lenses by the molds.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Effects of Electrolyte Formulas on Electrochemical Polish Planarization of Pure Copper

    J.C. HuangY. J. WengY. C. WengY. F. Chan...
    P.159-163页
    查看更多>>摘要：Electrochemical polish technology could enhance the chemo-mechanical polishing efficiency of copper material. During the electrochemical polishing process, both the components and operation parameters of electrochemical polish solution are the key factors influencing planarization ability. This work measured the surface topography and roughness of copper material after mechanical polish by an atomic force microscope (AFM), and added glycerol in different ratios to the phosphoric acid (85 wt %), which was the main composition of experiment solution. Electrochemical polish was conducted within the potential action range in passivation area, and the surface topography and roughness of copper material after electrochemical polish was measured by AFM. The difference in surface topography of copper material after electrochemical polish was compared as well.The experiment indicated that after electrochemical polish in pure phosphoric acid for 50 sec, the surface roughness of copper material obviously decreased from 6.921nm (Ra) to 0.820nm (Ra), and the planarization was more obvious with the increase of electrochemical polish time. The above results could appear in different electrolyte formulas, indicating that electrochemical polish was a good processing method for copper material planarization. This work also proposed the effect of analyzing the electrochemical polish time on planarization through planarization efficiency. Based on the analysis, the planarization efficiency was decreased with the increase of electrochemical polish time, which indicated that longer electrochemical polish time did not yield better result. This work also found that the surface is not only flattened, but also glossed after electrochemical polish.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Development of 2DOF Ultrasonic Vibration Cutting Device for Ultraprecision Elliptical Vibration Cutting

    Toshimichi Moriwaki
    P.164-168页
    查看更多>>摘要：A new ultrasonic vibration cutting device for ultraprecision elliptical vibration cutting has been developed. The elliptical vibration cutting device developed utilizes combination of bending and longitudinal modes of vibration of the stepped vibrator to generate circular or elliptical vibration locus at the cutting tool edge. The design principle as well as the structure and the performance of the elliptical vibration cutting device is introduced here. The experimental results of diamond cutting of Co-Cr-Mo Alloy proved that good surface quality with roughness of 20 nmPV can be obtained stably with the elliptical vibration cutting device developed.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Investigation on Influences by Adapting Additives to Electrolytic In- Process Dressing (ELID) Grinding

    Ning LouIoan D. MarinescuMichael C. Weismiller
    P.169-173页
    查看更多>>摘要：As demand for high-quality machined tools considerably grows, ELID, a new and efficient technology, has been successfully brought into the precise manufacturing industry of hard and brittle materials with mirror surface finish. Hence, besides conventional functions like lubrication, fluid solutions in this grinding process are required to serve more functions, especially as electrolyte. Writers of this paper mainly work on the methodology to optimize this kind of fluid by adding various related chemical additives. By varying the pH, the accretion of additives is controlled and consequential effects are studied which is the metallic oxide layer variation before and after each test. Corresponding experiments have been carried out with procedures and results analysis included in the paper.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Focused Ion Beam Nano-Precision Machining for Analyzing Photonic Structures in Butterfly

    Houxiao WangWei ZhouErping Li
    P.174-177页
    查看更多>>摘要：Nano-precision machining using focused ion beam (FIB) is widely applied in many fields. So far, FIB-based nanofabrication for specific nanoscale applications has become an interesting topic to realize more diversities for nano-construction. Through FIB machining, we can easily achieve the required nano- and micro-scale patterning, device fabrication, and preparation of experimental samples. Nowadays, there is an increasing trend to learn from nature to design novel multi-functional materials and devices. Thus, more interestingly, another advantage of FIB is that it can be conveniently used to analyze the natural photonic structures, e.g., those in the butterfly which exhibits amazing optical phenomena due to sub-wavelength structural color. Accordingly, in the present study, structural analyses for butterfly wings were carried out using FIB. It is found that the photonic structures for the backside and frontside of the butterfly wing studied differ considerably. The difference accounts for the different colors on the dorsal and ventral sides of butterfly wings.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Reverse Simulation of Sinking EDM for Intricate Shapes

    Yuki KANEKOMasanori KUNIEDA
    P.178-182页
    查看更多>>摘要：This research aims to develop a reverse simulation method to obtain the shape of tool electrode before machining from the shapes of workpiece before and after machining in sinking EDM. To apply the reverse simulation method to tool electrodes which have large curvatures, a special operation was added to the simulation program to consider the influence of the curvature. The validity of the principle of the modified reverse simulation was demonstrated in the machining of a V-shaped cavity.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Machined Surface Characteristics and Removal Mechanism of Soft and Brittle Solids

    Zhenyu ZhangRudy IrwanHan Huang
    P.183-187页
    查看更多>>摘要：Surface characteristics of CZT wafers machined using wire sawing, free abrasives lapping and polishing and ultra-precision grinding were investigated. Wire sawing resulted in the removal of material in both ductile and brittle regimes, but both polishing and grinding led to a ductile removal. The grinding produced very smooth surfaces free of embeddings and scratches, which is thus considered to have better machinability than the free abrasive machining. The nanoindentation and nanoscratch on MCT wafers at nanometric scales resulted in considerable plastic deformation, but no fracture features. The hardness of the MCT wafer was 500 to 550 MPa, and the coefficient of friction was particularly high, ranging from 0.45 to 0.55.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Nickel Injection Mould Fabrication via Proton Beam Writing and UV Lithography

    Liu Nan NanShao PeigeShripad R. KulkamiZhao Jianhong...
    P.188-192页
    查看更多>>摘要：For applications of injection mould fabrication in the field of MEMS, proton beam writing (PBW) and UV lithography are combined to manufacture 2 mm thick Ni moulds with sub-10 μm fine features in 10 μm deep fluidic channels. PBW is capable of writing micro and nano features with straight and smooth sidewalls with sub-10 nm RMS roughness, while UV lithography has the advantage of large area structuring through a mask. A newly developed positive resist maP1275 hv is presented in combination with PBW and UV lithography for Ni injection mould fabrication. Fine micro pillars with straight and smooth sidewalls have been achieved by PBW and linked with UV lithography into a micro fluidic channel. The new resist is successfully removed after electroplating without compromising the Ni mould.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Parametric Study of Micro Machining Three Dimensional Microstructure with the Tiny-grinding Wheel Based on the EMR Effect

    Weiqiang GaoQiusheng YanYi LiuJiabin Lu...
    P.193-197页
    查看更多>>摘要：Electro-magneto-rheological (EMR) fluids, which exhibit Newtonian behavior in the absence of a magnetic field, are abruptly transformed within milliseconds into a Bingham plastic under an applied magnetic field, called the EMR effect. Based on this effect, the particle-dispersed EMR fluid is used as a special instantaneous bond to cohere abrasive particles and magnetic particles together so as to form a dynamical, flexible tiny-grinding wheel to machine micro-groove on the surface of optical glass. Experiments were conducted to reveal the effects of process parameters, such as the feed rate of the horizontal worktable, feeding of the Z axis, machining time and machining gap, on material removal rate of glass. The results indicate that the feed rate of the worktable at horizontal direction has less effect on material removal rate, which shows a fluctuation phenomenon within a certain range. The feed rate of the Z axis directly influences the machining gap and leads to a remarkable change on material removal rate. Larger material removal rate can be obtained when the feeding frequency of Z direction is one time per processing. With the increase of rotation speed of the tool, material removal rate increases firstly and decreases afterwards, and it gets the maximum value with the rotation speed of 4800 rev/min. The machining time is directly proportional to material removal amount, but inversely proportional to material removal rate. Furthermore, material removal rate decreases with the increase of the machining gap between the tool and the workpiece. On the basis of above, the machining mode with the tiny-grinding wheel based on the EMR effect is presented.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Effect of Tool Cone Angle on Micro Machining Based on the EMR Effect

    Yi LiuQiusheng YanJiabin LuLingye Kong...
    P.198-202页
    查看更多>>摘要：Aiming at micro machining of 3D microstructure of brittle materials with a novel tiny-grinding wheel based on the electro-magneto-rheological (EMR) effect, five conical tools with different cone angles are designed to reveal the effect of the cone angle on the machining characteristics. The distribution of the magnetic and electric fields in the polishing area is simulated using the finite element analysis software, and the machining experiments of micro groove were conducted to confirm the simulation results. Experimental results indicate that the material removal rate increases first and decreases afterwards with the increase of the cone angle, and the section width of micro groove increases but the section depth of micro groove shows a fluctuation phenomenon within a certain range. The intensities of the electric and magnetic fields on the tip of the conical tool with the 45° cone angle are at a larger level in the five tools, which is helpful to form a stable tiny-grinding wheel based on the EMR effect and obtain a better machining effect, so the tool with the 45° cone angle is an effective and ideal machining tool for the machining of 3D microstructure.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd