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Key engineering materials
Trans Tech Publications Ltd.
Key engineering materials

Trans Tech Publications Ltd.

半月刊

1013-9826

Key engineering materials/Journal Key engineering materials
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    Fabrication of Large Grating by Monitoring the Latent Fringe Pattern

    Lijiang ZengLei ShiLifeng Li
    P.56-60页
    查看更多>>摘要：Contemporary chirped-pulse-amplified high-power laser systems rely on meter-sized diffraction gratings for pulse compression. Fabricating large gratings is a bottle-neck problem. We developed a multiple-holographic-exposure method to fabricate large monolithic gratings. In consecutive exposures, the attitude of the photoresist-coated substrate is monitored and adjusted by using two interferometers with a He-Ne laser, and the relative position between the substrate and the exposure interference fringes is adjusted by using the interference fringes between the diffraction orders of the latent grating with the exposure beams as the incident beams. A mosaic grating with a size of 80×50 mm~2 was fabricated, and the wavefront aberration of the lst-order diffraction wavefront in the mosaic area is better than λ/10 PV @633 nm.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Design and Analysis of a 6-DOF Monolithic Nanopositioning Stage

    Lingli ChengJianwei YuXiaofen Yu
    P.61-65页
    查看更多>>摘要：A 6-DOF monolithic nanopositioning stage is developed for three coordinate measuring machines (CMM) with nanometer resolution. The stage consists of a monolithic flexure hinge mechanism, six piezoelectric actuators and six fiber-optic displacement sensors. A mathematical model of the constraint optimization problem is presented. Based on the solution of the optimization problem, the final design of the 6-DOF stage is also presented. The numerical analysis on static and dynamic behavior of the stage is done by using the finite element method. The experimental results of the performance of the 6-DOF stage are presented.
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    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    In Situ Mechanical Property Measurement of Titania Nanowires

    Ming ChangJuti Rani DekaChia Hung LinChin Chung Chung...
    P.66-69页
    查看更多>>摘要：One-dimensional (1D) nanostructure such as nanowires (NWs), nanobelts and nanorods have attracted tremendous attention in recent years due to their exceptional micro-structural properties and novel potential applications. In the present investigation, titania (TiO_2) nanowires are synthesized by microwave hydrothermal process (MHP) treating TiO_2 nano powder with NaOH inside a microwave oven for 5h at 210℃ and 350W. The mechanical properties of as synthesized TiO_2 nanowires are determined by bending it with a nanomanipulator inside a scanning electron microscope (SEM). Young's moduli of the nanowires are measured to be approximately 11.87±0.923GPa.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Computed Tomography for Application in Manufacturing Metrology

    Albert WeckenmannPhilipp Kraemer
    P.73-78页
    查看更多>>摘要：As a rather new technology, X-Ray Computed Tomography offers new and promising possibilities in manufacturing metrology in comparison to well-established tactile or optical measurements. The main benefit is the volumetric model which results of each measurement and represents the measurement object holistically with high point density.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Achieving Traceability of Industrial Computed Tomography

    Markus BartscherMarko NeukammUwe HilpertUlrich Neuschaefer-Rube...
    P.79-83页
    查看更多>>摘要：Achieving traceability is crucial for complex measurement techniques, especially for coordinate measuring machines (CMMs). For CMMs using tactile probes, traceability can for certain measurements be achieved using model-based uncertainty budgets. Up to now, uncertainty simulations could be used applicable only for tactile CMM measurements of regular geometries, but are available as an add-on for different CMMs. This procedure is accepted by guidelines and international standards (VDI/VDE 2617-7, supplement 1 [1] to GUM). Furthermore, empirical approaches to assess the measurement uncertainty by means of calibrated workpieces or prior knowledge exist or are under development. These approaches can as a matter of principle also be used for CMMs featuring computed tomography (CT). In this paper, the empirical assessment of the measurement uncertainty of the upcoming measurement technology CT [2, 3] will be discussed uniting the present approaches and the current knowledge, with the focus being on the applicability of concepts for users in industry. For this purpose, the influences on dimensional CT measurements are analyzed and evaluated, taking the measurement data of a current industrial micro CT system as a basis.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Developments in Homodyne Interferometry

    Walter Schott
    P.84-88页
    查看更多>>摘要：The trend in many fields of enabling technologies, such as microelectronics, communications, microsystems, and micromechanics, toward imposing increasingly stringent demands upon precision continues. Those types of technologies allow creating micromechanical components having dimensions of a few micrometers that have to be accurately measured, positioned relative to one another, and assembled. In that conjunction, laser-interferometric metrology provides unique opportunities that combine measurements over large ranges at extraordinarily fine resolutions with traceability of measurement results to international length standards. Laser-interferometric metrological systems may be used for measuring displacements ranging from subnanometers to several meters, without need for reconfiguring the optical or electronic systems involved or their component devices.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Development of Innovative Fringe Locking Strategies for Vibration-Resistant White Light Vertical Scanning Interferometry (VSI)

    Liang-Chia ChenAbraham Mario TapilouwSheng-Lih YehShih-Tsong Lin...
    P.89-94页
    查看更多>>摘要：White light interferometry has become an important method for measuring micro surface profiles with a long vertical range and nano-scale resolution. However, environmental vibration encountered in in-field optical inspection is usually unavoidable and it affects measurement performance significantly. Isolating vibration sources from the measurement system sometimes is not completely effective, especially within complicated in-field fabrication environment. Therefore, in this research we aim to develop a novel method in achieving white-light fringe-locking condition during vertical scanning processes. The developed optical system consists of white light source, a Mirau objective, a PZT vertical scanner, an optical band-pass filter and two image sensing devices. The developed system generates a high and a low coherent interferograms, simultaneously captured by two charged coupled devices (CCDs). The high coherent interferogram is employed to detect high-speed nano-scale displacement and direction of the external vibration. An innovative real time fringe-locking operation is performed and a new vertical scanning technique is performed accordingly to isolate vertical scanning from environmental disturbances. The feasibility of the anti-vibration VSI system is verified by performing some of industrial in-field examples. Based on the experimental result, the fringe locking technique can improve the measurement result.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Compensation of Tilt Angles and Verification of Displacement Measurements with a Fabry-Perot Interferometer

    Yung-Cheng WangLih-Homg ShyuWen-Yuh JyweBean-Yin Lee...
    P.95-97页
    查看更多>>摘要：The construction of Fabry-Perot interferometer is very simple and it has been already utilized in different measurement systems. The result of displacement measurement is obviously influenced by the tilt angles of measurement mirror, if a Fabry-Perot interferometer is utilized for displacement measurement. Hence, the measuring range of current systems is rather small (less than 1 mm). The goal of this investigation is to develop a Fabry-Perot interferometer for large travelling range (till 60 mm) by aid of compensation of tilt angles with an angular sensor, piezo translators, control mechanism and self-designed software. To verify the measuring characteristic of the self-developed Fabry-Perot interferometer, some comparison measurements have been performed. A commercial laser interferometer serves as reference standard and the differences between Fabry-Perot interferometer and the commercial Laser interferometer are measured. Through experimental tests, the differences are less than 0.3 μm in the full measurement range. The results show that the Fabry-Perot interferometer can meet the measuring requirement with high accuracy of sub-micrometer order and large measurement range.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    A Compact Signal Processing with Position Sensitive Detectors Utilized for Michelson Interferometer

    Lih-Horng ShyuYung-Cheng WangJui-Cheng Lin
    P.98-102页
    查看更多>>摘要：Interferometric signals of a homodyne Michelson interferometer appear in sinusoidal forms. In this investigation, new concepts for signal processing of Michelson interferometer are demonstrated. With the utilization of detection of position sensitive detector (PSD) and by the procedure of differential signals and the characteristic of symmetric waveform, a compact signal processing for homodyne Michelson interferometer has been developed. Its advantages include simplified procedure, fast processing and few electronic hardware. For experiment tests of the signal processing, a conventional homodyne Michelson interferometer has been constructed. Major components of the interferometer consist of laser light source, beam splitter, mirrors, PSD and piezo transducer for driving measurement mirror. To verify the performance of the signal processing, a commercial nanopositioning stage as reference standard has been utilized for comparison measurements. Through theoretical analysis and experiment tests, it can be proved that by the developed signal processing an interferometer possesses the optical resolution of 79 nm. With support of the developed signal processing, interferometers will possess the benefits of simply structure, few components and lower cost.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd

    Improvement on Measuring Optical Nonlinear Phase Shift by Self-Aligned Interferometer

    Chongxiu YuBing JuJinhui YuanXinzhu Sang...
    P.103-107页
    查看更多>>摘要：The measuring mechanism of the self-aligned interferometer (SI) is analyzed in detail in the paper. The expression Δφ of nonlinear phase shift and its error expression δ_φ are derived. Thereasons of influencing on the measuring accuracy of the nonlinear phase shift are analyzed theoretically. The influences of the SI structure parameters on measuring the nonlinear phase shift are simulated and calculated. Properly selecting structure parameters in the SI, the optimal value Δφ and δ_φ are obtained. A measuring system using the optimal structure parameters is set up. The measured nonlinear phase shift Δφ coincides with the theoretical value. When compared the measured Δφ with other testing values from reference [2], the deviation δ_φ obtained in our experiment is smaller.The experimental results show that the measuring method with simulating and optimizing the structure parameters in the SI is effective and convenient. The measuring method improved will be applied widely in optical fiber communications and optical precise measurements.
      原文链接:
    • NETL
    • NSTL
    • Trans Tech Publications Ltd